Plasma Exhaust Gas Treatment Equipment
Plsasma Scrubber APX01
Production Description
◆ High Efficiency × Low Power Consumption
◆ Compatible with automatic dosing systems for acid-base neutralization
◆ Uses cost-effective nitrogen (N₂) as the process gas
◆ Compact design for easy integration into in-line production systems
◆ Wet scrubbing function for simultaneous removal of water-soluble gases
◆ ON/OFF interlock with upstream equipment for enhanced energy saving and safety
◆ High-temperature plasma technology effectively decomposes hard-to-break gases such as perfluorocarbons (PFCs)
◆ Compatible with automatic dosing systems for acid-base neutralization
◆ Uses cost-effective nitrogen (N₂) as the process gas
◆ Compact design for easy integration into in-line production systems
◆ Wet scrubbing function for simultaneous removal of water-soluble gases
◆ ON/OFF interlock with upstream equipment for enhanced energy saving and safety
◆ High-temperature plasma technology effectively decomposes hard-to-break gases such as perfluorocarbons (PFCs)
Product Features
- Panel Industry: STN, TFT, OLED, LTPS
- LED Manufacturing, PCB Industry, Touch Panel Industry
- Semiconductor Process Equipment Exhaust Treatment
- Conventional Manufacturing Industries:
- (1) Petrochemical Process Exhaust
- (2) Textile Industry Gas Emissions
- (3) Chemical Process Exhaust Treatment