Corona Poling (Polarization) Equipment POL-57A

Creating Nano Technologies Inc., with decades of superior plasma technology development, equipment manufacturing experience, has launched a batch-type corona polarization equipment POL-57A. Combined with optimized plasma electrode and power supply design, plasma diagnosis technology, and equipment automation, this equipment is suitable for processing the polarization process of piezoelectric thin films processing. It is easy to operate with a human-machine interface, has the ability to suppress electrical arc, and has intelligent process diagnosis functions.

• Supports robotic wafer handling
• One-touch fully automatic operation for stable performance
• Programmable and modular process settings, suitable for R&D and production
• Patented smart process with built-in sensors for real-time monitoring, process stability recording, and anomaly prediction

• Various organic piezoelectric film (e.g. Arkema’s Piezoelectric® FC20, copolymer and homopolymer) applications:
• pressure sensor
• Biometric (fingerprint) chip
• Actuator
• membrane speaker
• etc