Measurement Controller
電漿光譜分析儀 (OES)
Production Description
The plasma spectrometer is a non-invasive plasma analysis instrument that monitors and analyzes plasma element characteristics during processing, enhancing process control and enabling subsequent process analysis.
Product Features
- Vacuum-mounted detection head
- Anti-coating assembly
- Capable of observing specific wavelengths
- Flow meter control
- Expandable to control up to 4 flow meters
- Plasma spectral component analysis for subsequent processing
- Customizable