Measurement Controller
Plasma Optical Emission Spectrometer (OES)
Production Description
The plasma spectrometer is a non-invasive plasma analysis instrument that monitors and analyzes plasma element characteristics during processing, enhancing process control and enabling subsequent process analysis.
Product Features
- In-vacuum optical probe
- Deposition protection assembly
- Monitoring of selected wavelengths
- Flow meter control
- Expandable to control up to four flow meters
- Further analysis of plasma emission spectra
- Customizable configurations