
AP Plasma
Advance Plasma & Inspection System


Production Description
◆ Multi-Gas Compatibility: Switch between N₂, O₂, Ar, and other gases as needed for the process
◆ Flexible Module Width: Covers everything from small components to irregular substrates
◆ Custom Analysis Software: Real-time visualization of measurement data for more intuitive decision-making
◆ One-Stop Operation: Reduces handling and shortens overall process time
◆ Flexible Module Width: Covers everything from small components to irregular substrates
◆ Custom Analysis Software: Real-time visualization of measurement data for more intuitive decision-making
◆ One-Stop Operation: Reduces handling and shortens overall process time
Product Features
- Nanometer-Scale Planarization | Patterned Etching / Coating
- Surface Roughness Improvement & Polishing
- High-Cleanliness Residue Removal | No Residue for Safer Results
- Microscopic Image Reconstruction
- For High-End Industries: Semiconductor, Display Panels, LED, etc.