UA-20935187-3
AP Plasma

Advance Plasma & Inspection System

Advance Plasma & Inspection System
Advance Plasma & Inspection System
Production Description
◆ Multi-Gas Compatibility: Switch between N₂, O₂, Ar, and other gases as needed for the process
◆ Flexible Module Width: Covers everything from small components to irregular substrates
◆ Custom Analysis Software: Real-time visualization of measurement data for more intuitive decision-making
◆ One-Stop Operation: Reduces handling and shortens overall process time
Product Features
  • Nanometer-Scale Planarization | Patterned Etching / Coating
  • Surface Roughness Improvement & Polishing
  • High-Cleanliness Residue Removal | No Residue for Safer Results
  • Microscopic Image Reconstruction
  • For High-End Industries: Semiconductor, Display Panels, LED, etc.

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